Imec demonstrates first wafer-scale fabrication of solid-state nanopores using EUV lithography

Breakthrough enables scalable, high-precision biosensing applications in life sciences and healthcare

LEUVEN, Belgium, Dec. 9, 2025 /PRNewswire/ --

• Imec has achieved the first successful wafer-scale fabrication of solid-state nanopores using EUV lithography on 300mm wafers. This innovation transforms nanopore technology from a lab-scale concept into a scalable platform for biosensing, genomics and proteomics.
• Nanopores are hailed as gamechangers for genomics and proteomics, but until now, solid-state nanopores were never mass-produced due to variability and integration challenges. Imec's breakthrough paves the way for high-throughput, CMOS-compatible biosensor arrays that could accelerate personalized medicine, rapid diagnostics, and molecular data storage.
• Wafer-scale fabrication using EUV lithography on 300mm wafers of nanopores as small as ~10 nm with high uniformity across the wafer. The fabrication process shows promise for achieving pore sizes below 5nm with further enhancements to process integration techniques. Electrical and bio-molecular translocation characterization revealed a high signal-to-noise ratio of 6.2.
• "Imec is uniquely positioned to make this leap. We can apply EUV lithography - traditionally reserved for memory and logic - to life sciences. By leveraging our lithography infrastructure, we've shown that solid-state nanopores can be fabricated at scale with the precision needed for molecular sensing," said Ashesh Ray Chaudhuri, first author and R&D project manager at imec. "This opens the door to high-throughput biosensor arrays for healthcare and beyond."

About imec
Imec is a world-leading research and innovation hub in advanced semiconductor technologies. Leveraging its state-of-the-art R&D infrastructure and the expertise of over 6,500 employees, imec drives innovation in semiconductor and system scaling, artificial intelligence, silicon photonics, connectivity, and sensing.

Imec's advanced research powers breakthroughs across a wide range of industries, including computing, health, automotive, energy, infotainment, industry, agrifood, and security. Through IC-Link, imec guides companies through every step of the chip journey - from initial concept to full-scale manufacturing - delivering customized solutions tailored to meet the most advanced design and production needs.

Imec collaborates with global leaders across the semiconductor value chain, as well as with technology companies, start-ups, academia, and research institutions in Flanders and worldwide. Headquartered in Leuven, Belgium, imec has research facilities in Belgium, across Europe and the USA, and with representation on three continents. In 2024, imec reported revenues of €1.034 billion. For more information, visit www.imec-int.com

Full press release: https://www.imec-int.com/en/press/imec-demonstrates-first-wafer-scale-fabrication-solid-state-nanopores-using-euv-lithography

source: Imec